SemiconBroch
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When most people hear the word "semiconductor" they think of processing speed. When folks like us hear "semiconductor" we think of process purity. The microscopic topography of today's silicon circuits demand the cleanest manufacturing facilities on earth. We know that, and we build liquid level, flow and pressure sensors to meet those stringent requirements. It's because of these special requirements we have a special semi- conductor sensor team at Gems. These men and women are dedicated to making your manufacturing clean and simple. Gems Sensors Inc. offers semiconductor equipment...

APPLICATIONS Gems features product for more applications than you can shake a sensor at, so we can't begin to list them all. This short list should give some guidance for the typical usage of Gems sensor products in semiconductor manufacturing. We urge you to remember that our engineering capability allows us to develop specially configured sensors, so please don't hesi- tate to ask about a product or application not shown in this brochure. PROCCESING APPLICATION TYPICAL SENSOR DEPOSITION EQUIPMENT (CVD/PVD) Use on cooling line around deposition chamber Control vacuum in deposition chamber...

PureSense LS-300TFE Liquid Level Sensor 100% PTFE / TFM construction suitable for the highest purity etching acids, DI water, and solvents used in wet benches, CMP, and chemical delivery systems. Withstands harshest environments without contaminating the most sensitive media. Compact size offers minimal liquid displacement and wetted surface area. Up to 4 actuation levels per sensor. Available with specialized cleaning, and cleanroom UL/CSA recognition pending / CE certified for Liquid Level Sensors Single point level switches suitable for leak detection of the most aggressive media. PVDF...

Gems has conducted extensive extraction testing to allay any concerns regarding leaching of trace metals from the metal shaft inside the stem of our LS-300TFE. The sensors were immersed in high purity acid for as long as 38 days. The results, illustrated below, show negligible amounts of elements extracted; the possibility of media contamination is remote. PureSense LS-700 Liquid Level Sensor Electropolished stainless steel liquid level sensor ideal for high purity solvents, photoresists, pyrophoric compounds, and specialized CVD chemicals. Compact design suitable for level sensing in the...

Critical Cooling FS-380/FS-927 Liquid Flow Switches Sensors ideal for low coolant flow protection of valuable semiconductor processing equipment. Ultra-Compact, rugged alloy designs at an economical price. Wide temperature capabilities. UL recognized/CE certified for SEMI S2-93 requirements. RotorFlow® RF-2500 Flow Sensors Fail-Safe flow sensors for protection of loss of liquid flow on critical cooling loops. Suitable for use with perfluorinated coolants, Versions available with wide temperature capabilities Available with continuous outputs, adjustable switch outputs, or visual indication...

LS-700 and LS-300 Liquid Level Switches M ulti-point level switches offer minimal tank intrusion for liquid level control. Available in alloy and engineered plastic constructions for wide chemical compatibility. Suitable for uses in coolant tanks, gas scrubbers, and DI water filtration systems. Versions available with wide temperature capabilities UL/CSA recognized—CE certified for SEMI S2-93 XM/XT-800 Continuous Liquid Level Transmitters Liquid level transmitters ideal for monitoring expensive perfluoronated coolants in heat exchangers. Wide temperature capabilities. Available with a...

In semicon manufacturing you don’t need parts—you need a partner! Gems Sales Offices Call Toll Free to be connected to the U.S. office nearest to you The Gems philosophy is to provide solutions, not sell parts off the shelf. Here’s a quick recap as to why you 800-378-1600 can be secure in partnering with Gems Sensors Inc. • Broadest line of liquid level, flow and pressure sensors for semicon manufacturing • Specialized cleaning, handling New from Gems... and packaging • Highest quality fluorocarbon materials • Rapid engineering and prototypes • Direct global sales/engineering force • 25...